5850EMH Series High Temperature Mass Flow Controllers (Temperature Measurement)
Proven long-term stability. Ultra-pure performance for high temperature applications.
Models 5850EMH / 5851EMH
Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.
Features: - High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He)
- Wide flow range (0.003 – 100 slpm)
- High-purity VAR 316L Stainless Steel
- Particulate-free
- Helium leak check ports
- Normally closed valve (normally open valve optional)
- Electrically-activated valve override
- Low command flow cutoff
- TTL compatible “valve off” function
