The Fastest and Most Accurate MFCsEnhanced with the Speed of EtherCAT®
Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126
Features: - Long-term zero stability of <±0.15% full scale per year
- Settling times: 300 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
- GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
